Monolithically integrated active waveguides and lasers using rare-earth doped spin-on glass

摘要

This LDRD program No. 3505.230 explored a new approach to monolithic integration of active waveguides and rare-earth solid state lasers directly onto III-V substrates. It involved selectively incorporating rare-earth ions into spin-on glasses (SOGs) that could be solvent cast and then patterned with conventional microelectronic processing. The patterned, rare-earth spin-on glasses (RESOGs) were to be photopumped by laser diodes prefabricated on the wafer and would serve as directly integrated active waveguides and/or rare-earth solid state lasers.