Thin film coated submicron gratings: theory, design, fabrication and application

摘要

The realization of new applications of submicron grating structures requires efficient theoretical methods and elaborate fabrication techniques. In this work rigorous diffraction theory for one-dimensional gratings has been investigated and optimization techniques, based on methods used in thin film optics, have been developed. Submicron gratings embossed in polycarbonate have been fabricated and characterized. This includes transmission measurements which are in good agreement with theoretical calculations. Designs for a wide range of optical filters, which lead to improved optical and mechanical properties, are presented. This has been demonstrated for broadband antireflection structures for solar energy applications, based on MgF(sub 2)-coated gratings. (author) figs., tabs., refs.