Vacuum-spark metal ion source based on a modified Marx generator

摘要

The plasma generating parts of ion sources including their power supplies are usually floated to high potential (ion extraction voltage), thus requiring great insulation efforts and high costs for high-energy ion beams. A new concept for pulsed ion sources is presented in which a single power supply is used to simultaneously produce the plasma and high extractor voltage via a modified Marx generator. Proof-of-principle experiments have been performed with high-current spark discharges in vacuum where multiply charged ions are produced with this Marx-generator based ion source (Magis). Using Magis, it has been demonstrated that pulsed ion beams of very high energies can be obtained with relatively low voltage. For copper, ion of charge states up to 7+ have been found whose energy was 112 keV for a charging voltage of only 10 kV.