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Preparation of thin films by ablation with ANACONDA ion beam generator

机译：用aNaCONDa离子束发生器烧蚀制备薄膜

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Thin films of silicon carbide are produced by using the technology of ion beam evaporation. Various analytical methods are used to analyze film thickness, film composition and crystallization for samples obtained with different target-substrate distances.

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Yatsui, K. ; Jiang, W. ; Davis, H. A. ; Olson, J. C. ; Waganaar, W. J.;
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年度 1996
页码 1-5
总页数 5
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Ion Beams; Silicon Carbides; Thin Films; Crystal Structure; Crystallization; Deposition; Ion Beam Targets; Technology Utilization; Thickness; Meetings;

机译：离子束;碳化硅;薄膜;晶体结构;结晶;沉积;离子束靶;技术利用;厚度;会议;

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专利

1. Preparation of nanometer thin films with intense pulsed electron beam ablation [J] . Liu ZJ, Le XY, Jiang XL, Surface & Coatings Technology . 2005,第1a3期

机译：强脉冲电子束烧蚀制备纳米薄膜
2. Preparation of Bi Layer Structured Ferroelectric Thin Film by Laser Ablation -℃SrBi_2Ta_2O_9 and Bi_4Ti_3O_12 Thin Films- [J] . Yoshihiro Oishi, Wen-Biao Wu, Yoshinori Matsumuro 電気学会論文誌. C . 1997,第3期

机译：激光烧蚀-SrBi_2Ta_2O_9和Bi_4Ti_3O_12薄膜制备双层铁电薄膜
3. Formation and Expansion of Ablation Plasmas Produced by Pulsed Ion Beams for Thin Films Production [J] . Masaru Yazawa, Chainarong Buttapeng, Nobuhiro Harada, 電気学会論文誌 A:基礎.材料.共通部門誌 . 2006,第1期

机译：用于薄膜生产的脉冲离子束产生的烧蚀等离子体的形成和扩展
4. Preparation of thin films by ablation with anaconda ion beam generator [C] . Yatsui K., Jiang W., Davis H. A., Electromagnetic Compatibility Symposium Record, 1968 IEEE . -1

机译：Anaconda离子束发生器烧蚀制备薄膜
5. Preparation of Iron Pyrite by Pulsed Electron Beam Ablation. [D] . Al-Shareeda, Omar. 2012

机译：脉冲电子束烧蚀制备黄铁矿。
6. Microwave excitation of spin wave beams in thin ferromagnetic films [O] . P. Gruszecki, M. Kasprzak, A. E. Serebryannikov, -1

机译：铁磁薄膜中自旋波束的微波激发
7. Formation and Expansion of Ablation Plasmas Produced by Pulsed Ion Beams for Thin Films Production [O] . Masaru Yazawa, Chainarong Buttapeng, Nobuhiro Harada, 2006

机译：脉冲离子束生产的消融等离子体的形成和扩展

Preparation of thin films by ablation with ANACONDA ion beam generator

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