Er-doped amorphous and crystalline Al(sub 2)O(sub 3) and La(sub 2)O(sub 3) films grown with low energy ions from an ECR plasma

摘要

The effects of low energy ions from a biased electron cyclotron resonance plasma during growth of Al(sub 2)O(sub 3) and La(sub 2)O(sub 3) are used to modify the density and crystalline quality of these oxide films. The type of phase formed for Al(sub 2)O(sub 3) is varied with the ion-assisted growth from amorphous to crystalline (gamma)-Al(sub 2)O(sub 3). The photoluminescence (PL) properties of different Er-doped Al- and La-oxide phases are examined and through comparison of the PL spectra, the local environment of Er in these oxide materials is discussed.