Surface charging of phosphors and its effects on cathodoluminescence at low electron energies

摘要

Measurements of the threshold for secondary electron emission and shifts of the carbon Auger line position have been used to deduce the surface potential of several common phosphors during irradiation by electrons in the 0.5--5.0 keV range. All of the insulating phosphors display similar behavior: the surface potential is within (+-)1 V of zero at low electron energies. However, above 2--3 kV it becomes increasingly negative, reaching hundreds of volts within 1 keV of the turn-on energy. The electron energy at which this charging begins decreases dramatically after Coulomb aging at 17 (micro)A/cm(sup 2) for 30--60 min. Measurements using coincident electron beams at low and high electron energies to control the surface potential were made to investigate the dependence of the cathodoluminescence (CL) process on charging. Initially, the CL from the two beams is identical to the sum of the separate beam responses, but after Coulomb aging large deviations from this additivity are observed. These results indicate that charging has important, detrimental effects on CL efficiency after prolonged e-beam irradiation. Measurements of the electron energy dependence of the CL efficiency before and after Coulomb aging will also be presented, and the implications of these data on the physics of the low-voltage CL process will be discussed.