Status of Multi-Beam Long Trace- Profiler Development

摘要

A multi-beam LTP is under development at MSFC in collaboration with Lawrence Berkeley National laboratory and Brookhaven National Laboratory. The Multi-beam LTP has been fully assembled. First tests of the MBLTP has demonstrated the feasibility of the multibeam approach. The calibrations are under way. The MBLTP is intended to be used for metrology support of the deterministic polishing experiments.