Large-Signal Injection-Level Spectroscopy of Impurities in Silicon

摘要

Deep level defects in silicon are identified by measuring the recombination lifetime as a function of the injection level. The basic models for recombination at deep and shallow centers is developed. The defect used for the theoretical model is the well-known interstitial Fe ion in silicon. Data are presented on silicon samples ranging in defect content from intentionally Fe- doped samples to an ultra-pure float-zone grown sample. These data are analyzed in terms of the injection-level spectroscopy model.