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Consideration on Isochronal Anneal Technique: From Measurement to Physics

机译：等时退火技术的思考：从测量到物理

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The isochronal anneal technique used to predict isothermal anneal behavior of MOS devices is analyzed as a function of experimental parameters. The effects of detrapping of trapped holes and compensating electrons are discussed.

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Flament, O. ; Fleetwood, D. M. ; Leray, J. L. ; Paillet, P.;
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年度 1999
页码 1-7
总页数 7
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
MOS transistors; Meetings; Isothermal processes; Trapping(Charge particles); Electrons; Irradiations; Annealing; Silicon oxides;

机译：mOs晶体管;会议;等温工艺;俘获（电荷粒子）;电子;辐照;退火;氧化硅;

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专利

1. Considerations on isochronal anneal technique: From measurement to physics [J] . Flament O., Paillet P. IEEE Transactions on Nuclear Science . 1999,第6期

机译：等时退火技术的注意事项：从测量到物理
2. Prediction of long-term thermal behavior of an irradiated SRAM based on isochronal annealing measurements [J] . F.Saigne, O.Quittard, L.Dusseau Microelectronics & Reliability . 2002,第3期

机译：基于等时退火测量预测辐照SRAM的长期热行为
3. Isochronal annealing studies of a plastically deformed ferromagnetic metal using magnetic hysteresis measurements [J] . Journal of Applied Physics . 1973,第11期

机译：利用磁滞测量对塑性变形铁磁金属的等时退火研究
4. Implant Monitoring Measurements On Ultra Shallow Implants Before And After Anneal Using Photomodulated Reflection And Junction Photovoltage Measurement Techniques [C] . M. Tallian, A. Pap, K. Mocsar, International Conference on Ion Implantation Technology . 2011

机译：使用光抗斑点反射和结光伏测量技术在退火之前和退火之前和之后的超浅植入物的监测测量
5. Continuous property measurement techniques and physics based mathematical model for frost growth control. [D] . Iragorry, Jose. 2005

机译：连续特性测量技术和基于物理学的霜冻生长控制数学模型。
6. Effect of Silver Annealing Conditions on the Performance of Electrolytic Silver/Silver Chloride Electrodes used in Harned Cell Measurements of pH [O] . Paul. J. Brewer, Richard. J. C. Brown 2010

机译：银退火条件对用于电解池pH测量的电解银/氯化银电极性能的影响
7. Application of Millimeter-wave Heating to Sintering of α-Alumina and Annealing of γ-Alumina(Physics, Processes, Instruments Measurements, INTERNATIONAL SYMPOSIUM OF JWRI 30TH ANNIVERSARY) [O] . MORI Masakazu, SAWAMURA Isao, MAKINO Yukio, 2013

机译：毫米波加热在α-氧化铝烧结和γ-氧化铝退火中的应用（物理，工艺，仪器和测量，JWRI 30周年国际学术研讨会）

Consideration on Isochronal Anneal Technique: From Measurement to Physics

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