McCarter Superfinish Grinding for Silicon, An Update

摘要

A grinding technique, discussed and certain referred to as the McCarterSuperfinish, for grinding large size optical components is surface characterization information about flatness and the relative magnitude of the subsurface damage in silicon substrates is reported. The flatness measurements were obtained with a Zygo surface analyzer, and the substrate damage measurements were made by x-ray diffraction and acid etching. Results indicate excellent control of flatness and fine surface finish. X-ray measurements show that the diamond wheels with small particle sizes used in the final phases of the grinding operation renders surfaces with relatively small subsurface damage.