Deposition and Characterization of Mo/CuInGaSe2/CdS/ZnO Solar Cells.

摘要

Mo thin films were deposited on sodalime glass (SLG) substrates using direct-current planar magnetron sputtering, with a sputtering power density of 1.18 W/cm2. The working gas (Ar) pressure was varied from 0.6 mtorr to 16 mtorr to gain a better understanding of the effect of sputtering pressure on the morphology and microstructure of the Mo. Thin films of Cu(In,Ga)Se2 (CIGS) were deposited on the Mo-coated glass using the 3-stage coevaporation process. The morphology of both the Mo-coated SLG and the CIGS thin films grown on it was examined using high-resolution scanning electron microscopy. The film microstructure, such as the preferred orientation, and the residual intrinsic stress were examined by X-ray diffraction.