Technique for Sputtering Transparent CdS and CdZnS Photoconductive Films.

摘要

A method of rf sputtering high quality cadmium sulfide and cadmium-zinc sulfide photoconductive thick films was developed. The light/dark film resistivity typically differs by 6orders of magnitude. Films are very transparent,adhere well to a variety of optically polished substrates,and do not require the usual postdeposition anneal to obtain high dark resistivity.