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美国政府科技报告
>LOW COST SILIOCON SOLAR ARRAY PROJECT Feasibility of Lowest, High-Volume Production of Silane arid Pyrolysis of Silane to Semiconductor-Grade Silicon Quarterly Progress Report, October-December 1978
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LOW COST SILIOCON SOLAR ARRAY PROJECT Feasibility of Lowest, High-Volume Production of Silane arid Pyrolysis of Silane to Semiconductor-Grade Silicon Quarterly Progress Report, October-December 1978
The presence of copper promotes a more rapid approach to the steady state operating condition and results in a more consistant reactor effluent composition. The average kinetic and equilibrium yield are unchanged. Incoloy has been identified as the preferred choice of material of construction for the hydrogenation reactor although certain metallurgical changes have been noted in samples exposed to the H2/HC1 atmosphere at 500°C which indicate the need for more testing.
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