Monte Carlo Computer Program for Analysis of Backscattering and Sputtering in Practical Vacuum Systems

摘要

A Monte Carlo computer program originally developed for analysis of molecular gas flow in axi-symmetric vacuum systems has been extended to include modelling of high energy backscattering and sputtering processes. This report describes the input data required by the computer program together with the results produced. A general description is given of the program operation and the backscattering and sputtering modelling used. An example calculation is included to illustrate practical application of the program. (Atomindex citation 10:488957)