A NONCONTACT, LASER INTERFEROMETER SWEEP GAGE

摘要

Parts that are manufactured with diamond tools on precision machines typically exhibit high-quality surfaces and contours;however, most materials that are diamond turned easily are also relatively soft and damage easily. Therefore, a noncontact, rotary inspection machine was developed. This machine utilizes a focused beam from a laser interferometer to measure variations in the surfaces of the reflective, spherical test parts used to characterize precision machines. Digital output data from the laser display is converted to an analog signal which is available for additional processing to provide contour and/or surface texture information.