Hydrogen Depth Profiling Using Elastic Recoil Detection

摘要

The elastic recoil detection (ERD) analysis technique for H profiling in the near surface regions of solids is described. ERD is shown to have the capability of detecting H and its isotopes down to concentrations of approx. 0.01 at. % with a depth resolution of a few hundred angstroms. Is is demonstrated that 2.4-MeV He ions can be used successfully to profile exp 1 H and exp 2 D using this technique. 12 figures. (ERA citation 04:024060)