Thermodynamics of the Tantalum-Carbon-Chlorine-Hydrogen System Applied to the CVD of Carbide/Carbon Composite Materials

摘要

Complex equilibrium thermodynamic calculations using the computer code SOLGASMIX-PV were performed for the Ta-Cl-H and Ta-C-Cl-H systems in order to evaluate the chemistry associated with the chemical vapor deposition of Ta, Ta sub 2 C, and TaC on graphite yarn and woven structures. Results of the thermodynamic calculations were compared with coated materials prepared by hydrogen reduction of TaCl sub 5 (g) and C sub 3 H sub 6 (g) between 1025 and 1223 exp 0 K using a variety of reaction gas compositions. (ERA citation 05:024395)