Laser-Interferometer Position-Feedback for Precision Machine Tools

摘要

Diamond turning of off-axis parabolic mirrors is used to provide high-quality turning and focusing optics for the Los Alamos Scientific Laboratory's laser-fusion research. These mirrors are fabricated at the Oak Ridge Y-12 Plant on a large machine tool that incorporates lasers, air bearings, and linear-motor slide-drives to meet the part specifications of 0.63 mu m (25 mu in) on contour and 63 nm (2.5 mu in) on surface finish. This report discusses the application of lasers to this machine and other precision machine tools. (ERA citation 08:013499)