Interferometric Measurements of Multilayer and Double Shell Inertial Fusion Targets

摘要

Optical interference microscopy plays an important role in the measurement of targets for inertial confinement fusion experiments. We describe how these techniques are applied to the measurement of thickness and refractive index of multilayer films on both flat substrates and microsphere targets. We also discuss procedures for manipulating and examining microsphere targets to measure defects and wall thickness variations anywhere on the target. Finally, we describe the use of optical interferometry to measure the individual components and final assembled structure of double-shell targets. The accuracy of these measurements is from 0.03 to 0.5 mu m, depending on the specific application. (ERA citation 05:036187)