Ultrasmooth Plasma Polymerized Coatings for Laser-Fusion Targets.

摘要

Coatings for laser fusion targets were deposited up to 135 mu m thick by plasma polymerization onto 140 mu m diameter DT filled glass microspheres. Ultrasmooth surfaces (no defect higher than 0.1 mu m) were achieved by eliminating particulate contamination. Process generated particles were eliminated by determining the optimum operating conditions of power, gas flow, and pressure, and maintaining these conditions through feedback control. From a study of coating defects grown over known surface irregularities, a quantitative relationship between irregularity size, film thickness, and defect size was determined. This relationship was used to set standards for the maximum microshell surface irregularity tolerable in the production of hydrocarbon or fluorocarbon coated laser fusion targets. (ERA citation 06:021719)