Theoretical Considerations on the Performance of Negative Sputter Ion Sources

摘要

Theoretical analyses of experimentally observed negative ion yield data from cesium rich plasma discharge sources such as those based on the University of Aarhus source concept appear to correlate experiment and theory through surface ionization mechanisms for many species. The agreement between experiment and theory is rather remarkable considering the idealistic model used. A few atomic species appear to overproduce relative to the simple theoretical model. These deviations suggest that still other mechanisms may be important for certain elements such as the affinity level mechanism recently reported. (ERA citation 07:044490)