Effect of Silane Fraction on the Optoelectronic and Photovoltaic Properties of RF-Glow-Discharge a-Si:H Prepared from SiH sub 4 + H sub 2 Mixtures

摘要

The properties of films grown from SiH sub 4 H sub 2 mixtures were systematically investigated. The hydrogen content, band gap, dark conductivity, and photoconductivity were measured as a function of SiH sub 4 fraction. Solar cells were fabricated from 10 and 25% mixtures. (ERA citation 08:055587)