Low Jitter Trigger for an Excimer Laser

摘要

The use of a highly focused beam from a small Q-switched Nd-YAG laser to trigger the high-voltage spark gap switch of a rare gas excimer laser is described. The design not only results in an order of magnitude improvement in jitter, but also leads to greatly improved trigger reliability and less electromagnetic interference to electronic equipment in the vicinity of the operating excimer laser. (ERA citation 10:011497)