Decomposition of CF sub 4 /Ar Mixtures in Corona Discharges

摘要

A number of gas mixtures have recently been proposed for use in diffuse discharge switch applications. Among these, the most promising are mixtures of perfluoroalkanes in rare gases (e.g., C sub 2 F sub 6 in Ar). For practical systems in which repetitive operation is necessary, a switching gas must, in addition to satisfying the requirements of a fast opening switch such as (1) high breakdown strength, (2) an attachment rate constant that increases with increasing E/N (density normalized electric field), and (3) high electron drift velocity at low E/N (typically approx.3 x 10 exp -17 V cm exp 2 ), be reasonably stable to decomposition due to electron impact and/or thermal degradation. Even in cases where the decomposition rate of the original gas is small, the formation of by-products, having properties undesirable to the performance of the switch, may occur. In this paper data are reported on decomposition products and processes occurring in CF sub 4 /Ar mixtures as a result of electron initiated corona discharges. (ERA citation 10:037309)