AEM-Based XEDS/EELS Microanalysis: A Materials Science Perspective

摘要

Nearly 50% of electron microscopes sold today come equipped for X-ray Energy Dispersive Spectroscopy (XEDS), and Electron Energy Loss Spectroscopy (EELS) is an old analytical technique. This paper outlines the topics involved in a parallel discussion of XEDS and EELS: basic physics, instrumentation, and specimen preparation/handling; basic quantification, advanced topics, and limitations; and future directions and applications. (ERA citation 12:006908)