Two-Dimensional CCD-Based System for Parallel Detection in EELS (Electron Energy Loss Spectroscopy)

摘要

A parallel Electron Energy Loss Spectroscopy (EELS) detector system has been developed which is based upon a two-dimensional charge coupled device (CCD) array. Performance data for the prototype system are presented. It is shown that a two-dimensional CCD detector is suitable for use as part of a parallel detector system for EELS. In addition to recording spectra, the device can be operated in an imaging mode, allowing a multifaceted experimental system to be configured from a single detector setup. In spectral acquisition mode, the experimentally measured detective quantum efficiency was 0.4 with a frame-to-frame signal fluctuation of only 0.4%. (ERA citation 13:007800)