Preparation of Superconducting YBa sub 2 Cu sub 3 O/sub 7-X/ Films by Magnetron Sputtering

摘要

We have prepared thin films of YBa sub 2 Cu sub 3 O/sub 7-x/ by dc-magnetron sputtering from three separate metallic targets onto ambient temperature substrates of (100)SrTiO sub 3 , (100) and random oriented ZrO sub 2 -9%Y sub 2 O sub 3 , and (100)MgO. After annealing, the films grown on SrTiO sub 3 showed a mixture of a- and c- axis orientation while the films grown on ZrO sub 2 and on MgO were randomly oriented. The targets used in sputtering were either yttrium, barium and copper or yttrium, Ba sub 2 Cu sub 3 and copper. The latter combination offered better control of the film composition because the CuBa ratio could be more accurately maintained and the target itself was more stable. To check the reproducibility of film composition, an Inductively Coupled Plasma --Atomic Emission Spectroscopy (ICP-AES) technique was employed to obtain average composition. Compositional variations in films produced under similar conditions are within 1--3% which was close to the instrumental resolution. 2 figs. (ERA citation 13:036859)