Investigation of Laser Diagnostics of PACVD Processes for Depositing Hard Face Coatings: Performance Report for the Period 1 February 1987-31 January 1988

摘要

Objective is to improve the understanding of the mechanisms which govern the nonequilibrium reactive plasma atomistic or molecular deposition of hard face coatings for erosion resistant applications. The goal is to provide a predictive capability that is severely lacking in the present science base of PACVD processing for depositing hard face coatings. Advanced laser diagnostics will be used to probe the plasma for improving process control. (ERA citation 13:024677)