Carbon Films Derived from Poly(Acrylonitrile): Oxidation, Electrical Properties, and Processing

摘要

Carbon films made by pyrolytic decomposition of PAN poly(acrylontrile) can be made with controlled electrical conductivity by varying the final temperature of pyrolysis. Further, the conductivity is a function of precursor structure, with lower PAN content yeilding lower conductivity. The gas phase oxidation proceeds through an intermediate surface oxidation, with an activation energy of ca. 33 kcal/mol. Films made in this way can be patterned using photolithography and oxygen etching; transfer of films from one substrate to another is accomplished with either dry or wet transfer techniques. 13 refs., 3 figs. (ERA citation 13:049132)