UHV (Ultrahigh Vacuum) Chamber with Facilities for Accelerator Based Hydrogen Profiling and In-situ Sample Preparation.

摘要

A UHV-system for in situ sample preparation and hydrogen profiling using nuclear resonance reactions e.g. (1)H(15)N, (alpha)(gamma)(12)C has been designed and built. The system includes two evaporation sources, Quartz Crystal Micro balance (QCM) equipment for thickness monitoring, an ion gun for sputtering, a combined pressure cell and vacuum lock for hydration of samples, a mass spectrometer for rest gas analysis, and a RBS detector. Programs for data analysis have been developed. The performance of the system has been checked by preparing and measuring some Mg-Pd samples.