Description of the Nano delta Indenter (R); An Ultra-Low-Load Microhardness Indentation Test Machine.

摘要

This report provides an introduction to the capabilities of a new experimental test system recently acquired by Department 1830 and installed into the Organization 1000 bay of the microelectronics Development Laboratory, Building 858. This device - the Nano delta Indenter/Trademark/ - is a state of the art ultra-low load indentation hardness tester. It is a computer-controlled load and depth sensing instrument with depth resolution of 0.2 nm and load resolution of 0.3 mu N. Initial testing has now been performed using this machine, verifying that it will be a unique addition to our existing mechanical test capabilities. 3 refs., 8 figs.