Thermodynamics, Kinetics, and Interface Morphologies of Phase Formation Reactions Between Metals and Gallium Arsenide: Bulk vs Thin-Film Studies.

摘要

During the past two years or so, we have been carrying out the following studies: (i) investigation of the thermodynamic stabilities of selected GaAs/M couples by determining the Ga-M-As phase diagrams at one temperature in the composition region of importance to the metallization of GaAs and (ii) determination of the kinetics and morphologies of reactions between GaAs and M for both bulk and thin-film cases. The metallic elements which have been studied are Pd, Pt, Ir, Rh, Nb, Co and Ni. In the following, we will summarize briefly our accomplishments. 27 refs.