Reactive sputtering of molybdenum-oxide gradient-index filters.

摘要

Molybdenum-oxide gradient-index films are produced by reactive sputter deposition. A molybdenum metal target is sputtered continuously with an argon-oxygen gas mixture. For each target power used, a reproducible oxide composition and corresponding refractive index result. Repetitive variation of applied target power is used to produce a structure composed of discrete layers of preselect stoichiometry. The systematic control of a single process parameter, target power, simplifies the fabrication of molybdenum-oxide rugate filters. 7 refs., 6 figs.