Effects of processing parameters on the laser deposition of high temperature superconducting thin films.

摘要

Y(sub 2)O(sub 3) pressed powders were ablated by pulses from a XeCl excimer laser, operating at 308 nm, 150 mJ/pulse, (approx)15 nsec/pulse and 20 Hz. Emission spectra from Y* and YO* were recorded as a function of ambient oxygen pressure in the range 10(sup (minus)5) -- 4 (times) 10(sup (minus)1) Torr, at a laser fluence of (approx) 4J/cm(sup 2). A kinetic model is developed to describe the results, and the application to production of laser-deposited high-temperature superconductor thin films is discussed. 13 refs., 4 figs.