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Mechanical properties of diamond and diamond-like films.

机译:金刚石和类金刚石薄膜的机械性能。

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A discussion of the factors influencing hardness and elastic modulus measurements of thin films and hard materials is given with emphasis on DLC and diamond. Hardness values ranging from 5 to 15 GPa and elastic (Young's) modulus of 40 to 130 GPa were foun ...

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