Soft x-ray projection lithography system design and cost analysis.

机译：软X射线投影光刻系统设计和成本分析。

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A baseline model providing technical performance specifications and preliminary cost assessments for a prototype Soft X-ray Projection Lithography (SXPL) system is presented. We find that the technical performance requirements for components of the SXPL s ...

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作者
N. M. Ceglio A. M. Hawryluk;
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年度 1991
页码 1-24
总页数 24
原文格式 PDF
正文语种 eng
中图分类工业技术 ;
关键词
Cost Estimation; Design; EDB/426000; EDB/440101; Functional Models; Integrated Circuits; Laser Radiation; Manufacturing; Mirrors; Optical Systems; Reflectivity; X-Ray Radiography;

机译：成本估算;设计; EDB / 426000; EDB / 440101;功能模型;集成电路;激光辐射;制造;反射镜;光学系统;反射率; X射线射线照相;

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专利

1. Development of laser-plasma soft X-ray source for projection lithography [J] . Y.Nishimura, A.Sakata 表面科学 . 1999 ,第3期

机译：投影光刻用激光等离子软X射线源的研制
2. Development of laser-plasma soft X-ray source for projection lithography [J] . Y.Nishimura, A.Sakata 表面科学 . 1999 ,第3期

机译：投影光刻用激光等离子软X射线源的研制
3. Development of laser-plasma soft X-ray source for projection lithography [J] . Y.Nishimura, A.Sakata 表面科学 . 1999 ,第3期

机译：激光等离子体软X射线源的研制投影光刻
4. Soft x-ray projection lithography system design and cost analysis [C] . Natale M. Ceglio, Andrew M. Hawryluk Conference on multilayer optics for advanced x-ray applications . 1992

机译：软X射线投影光刻系统设计和成本分析
5. Extending the COCOMO II software cost model to estimate effort and schedule for software systems using commercial -off -the -shelf (COTS) software components: The COCOTS model [D] . Abts, Christopher Mark 2004

机译：扩展COCOMO II软件成本模型，以使用现成的商用（COTS）软件组件估算软件系统的工作量和进度：COCOTS模型
6. Design and Fabrication by Thermal Imprint Lithography and Mechanical Characterization of a Ring-Based PDMS Soft Probe for Sensing and Actuating Forces in Biological Systems [O] . Tommaso Dattoma, Antonio Qualtieri, Gianmichele Epifani, 2019

机译：通过热压印光刻技术设计和制造基于环的PDMS软探针用于生物系统中的传感和驱动力。
7. Laser-induced Plasma X-ray Source and Its Applications. Development of Laser-plasma Soft X-ray Source for Projection Lithography. [O] . Yasuhiko NISHIMURA, Atsushi SAKATA, Hirozumi AZUMA 1999

机译：激光诱导等离子体X射线源及其应用。投影光刻激光等离子软X射线源的研制。
8. Wafer cost analysis for a soft x-ray projection lithography system. [R] . N. M. Ceglio A. M. Hawryluk 1991

机译：软X射线投影光刻系统的晶圆成本分析。

Soft x-ray projection lithography system design and cost analysis.

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