Soft x-ray microradiography and lithograph using a laser produced plasma source. Final report

摘要

Considering the hardware characteristics of the laser-induced plasma X-ray source and the limitations of the conventional cone-beam reconstruction algorithm, a general cone-beam reconstruction algorithm has been developed at our laboratory, in which the motion locus of the X-ray source is an arbitrary curve corresponding to at least a 2(pi) continuous horizontal angular displacement in the coordinate system of the specimen. The preliminary simulation shows that the general cone-beam reconstruction algorithm consistently results in visually satisfactory images.