SUB 1-Millimeter Size Fresnel Micro Spectrometer

摘要

An ultra-small micro spectrometer with less than 1mm diameter was constructed using Fresnel diffraction. The fabricated spectrometer has a diameter of 750 nmicrometers and a focal length of 2.4 mm at 533nm wavelength. The micro spectrometer was built with a simple negative zone plate that has an opaque center with an ecliptic shadow to remove the zero-order direct beam to the aperture slit. Unlike conventional approaches, the detailed optical calculation indicates that the ideal spectral resolution and resolving power do not depend on the miniaturized size but only on the total number of rings. We calculated 2D and 3D photon distribution around the aperture slit and confirmed that improved micro-spectrometers below 1mm size can be built with Fresnel diffraction. The comparison between mathematical simulation and measured data demonstrates the theoretical resolution, measured performance, misalignment effect, and improvement for the sub-1mm Fresnel micro-spectrometer. We suggest the utilization of an array of micro spectrometers for tunable multi-spectral imaging in the ultra violet range.