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Design of high-(Tc) bolometers on silicon membranes for a far infrared imaging array

机译：用于远红外成像阵列的硅膜上的高（Tc）辐射热测量计的设计

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We discuss the design of high-(Tc) superconducting bolometers for use in a far infrared imaging array from wave-lengths 30--100 (mu)m. Useful opportunities exist for imaging and spectroscopy with bolometer arrays made on micro-machined silicon membranes.

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作者
Verghese, S; Richards, P L; Fork, D K; Char, K; Geballe, TH;
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年度 1992
页码 1-7
总页数 7
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
EDB/665412; Yttrium barium cuprates;

机译：EDB / 665412;钡钡铜酸盐;

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专利

1. Wafer-level membrane transfer bonding of polycrystalline silicon bolometers for use in infrared focal plane arrays [J] . Niklaus F., Stemme G., Kalvesten E. Journal of Micromechanics and Microengineering . 2001,第5期

机译：用于红外焦平面阵列的多晶硅辐射热计的晶圆级膜转移键合
2. Design of high-T/sub c/ superconducting bolometers for a far infrared imaging array [J] . Verghese S., Richards P.L. IEEE Transactions on Applied Superconductivity . 1993,第1期

机译：远红外成像阵列的高T / sub c /超导辐射热计的设计
3. Heterogeneous 3D integration of 17 μm pitch Si/SiGe quantum well bolometer arrays for infrared imaging systems [J] . F. Forsberg, A. C. Fischer, N. Roxhed, Journal of Micromechanics and Microengineering . 2013,第4期

机译：用于红外成像系统的17μm间距Si / SiGe量子阱热辐射计阵列的异质3D集成
4. Design description of silicon micro-machined cavity coupled far-infrared bolometer array [C] . Gert de Lange, Michael D. Audley, Geert Keizer, International Symposium on Space Terahertz Technology . 2014

机译：硅微机械腔耦合远红外辐射热计阵列的设计说明
5. Low noise Millimeter-wave and THz Receivers, Imaging Arrays, Switches in Advanced CMOS and Silicon Germanium Processes. [D] . Uzunkol, Mehmet. 2013

机译：低噪声毫米波和太赫兹接收器，成像阵列，先进CMOS和硅锗工艺中的开关。
6. A Silicone-Based Stretchable Micropost Array Membrane for Monitoring Live-Cell Subcellular Cytoskeletal Response [O] . Jennifer M. Mann, Raymond H. W. Lam, Shinuo Weng, -1

机译：聚硅氧烷类伸缩性阵列微柱对膜监测活细胞亚细胞细胞骨架响应
7. Low noise high-Tc superconducting bolometers on silicon nitride membranes for far-infrared detection [O] . M. J. M. E. de Nivelle, M. P. Bruijn, R. de Vries, 1997

机译：氮化硅膜上的低噪声高Tc超导辐射热测量计，用于远红外探测
8. Design of high-(Tc) bolometers on silicon membranes for a far infrared imaging array [R] . Verghese, S., Richards, P. L., Fork, D. K., 1992

机译：用于远红外成像阵列的硅膜上的高（Tc）辐射热测量计的设计

Design of high-(Tc) bolometers on silicon membranes for a far infrared imaging array

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