Microwave sintering of multilayer ceramic capacitors

摘要

Multilayer ceramic capacitors of several compositions (both Z5U and NPO types) were sintered in air in both conventional and microwave furnaces. Several casketing and insulation techniques were used to improve temperature uniformity and minimize dopant losses. Zirconia and yttria are suitable packing materials as either powders or fibers. After sintering, the packing material remains friable and can be recycled. The presence of metallization layers did not interfere with the microwave process and no arcing was observed at surfaces where the internal electrodes emerged. In some runs, however, local thermal runaway was observed, which could severely decrease process yields and must be eliminated in a commercial process.