Growth and Characterization of Refractory Metal Multilayers: Potential Ultra-HighStrength-High Temp Surface Coatings

摘要

Two important fundamental results have been achieved which have broad applicationto the whole field of thin films and multilayer coatings. 1) Residual Stress: The first is that residual stress plays a key role in determining the ultimate properties of any coating. The synchrotron has proven valuable in determining residual stresses for films as thin as 2.5nm and as thick as 60 microns. New techniques have been developed to achieve these results and to extend the measurements of residual stresses to buried layers. 2) Texture: The second key finding is the ability to control texture both out-of-plane and in-plane has been demonstrated for a variety of refractory metal films and multilayer combinations. The texture work has likewise been able to show the evolution of complex textures via a combination of high resolution synchrotron grazing angle incident (GIXS) scattering and high resolution electron microscopy (HREM).