Distributed Bragg Grating Integrated-Optical Filters: Synthesis and Fabrication

摘要

The design, fabrication, and measurement of planar, passive Bragg grating-basedtransmission filters is presented. We combine interferometric lithography, spatial-phase-locked electron-beam lithography, x-ray nanolithography, and optical lithography with silica-on-silicon waveguiding substrates to define rib waveguides and grating patterns that have multiple quarter-wave shifts along the grating length. Transmission filters such as Gaussian, Butterworth, and Chebyshev can be designed and fabricated with these technologies.