Ultrafast Tunneling Sampler for Atomic-Resolution, High-Speed ElectronicMeasurements

摘要

A non-contact probe has been invented and developed for time resolved measurementof electrical waveforms with features as fast as one picosecond. The technique is based on atomic force microscopy modified for electrical sampling. Two generations of probe heads were designed, built, and tested. The fundamental limits of the system, including spatial, temporal, and voltage resolution, have been investigated. State of the art integrated circuits from Intel and National Semiconductor were tested with nanosecond resolution to show that the instrument has potential industrial application. U.S. Patents 5,381,101 and 5,488,305 were granted to Stanford University and licensed to industry. A GaAs nonlinear transmission line was monolithically integrated with a specially designed high speed cantilever and used to probe transients less than one picosecond in duration. Harmonic mixing frequencies as high as 333 GHz were measured.