Special Technology Area Review on Micro-Opto-Electro- Mechanical-Systems (MOEMS).

摘要

Few new defense technologies have excited the professional community as much as MEMS. Utilization of the chip making manufacturing infrastructure to create a new class of devices ranging over a wide number of military applications makes a compelling statement. DARPA initiated this activity and has provided the major sponsorship. Now, an outgrowth of this technology into the optical region, micro-opto-electro-mechanical (MOEMS) devices, offers new potential for defense exploitation. This STAR report has assessed the current status of this technology and provides findings and recommendations for use in future defense technology planning. In particular, the STAR revealed that we are at the beginning of an era of technological advancement that could offer revolutionary new optical system concepts. Evaluation of the individual STAR presentations found that: MOEMS affords the capability to fabricate a variety of devices. MOEMS has significant potential for use in military systems. commercial opportunities exist for MOEMS, particularly in the display arena. Existing fabrication lines can be easily adapted for MOEMS production.