Investigations of the Temperature and Concentration Dependencies of ESR Spectrum of Residual Donors in N-Type Bulk 6H SiC

摘要

This report results from a contract tasking Institute of Semiconductor Physics as follows: The contractor will investigate the ESR spectra of n-type 6H SiC over wide temperature and concentration ranges to establish the number of residual donors inherent in the 6H SiC polytype and their energy characteristics.