AASERT 95 Short Wavelength Fiber Lasers.

摘要

Graduate students involved in a research program at the University of Illinois focused on fabricating microdischarge devices and arrays on silicon. Our goal is to combine two disparate and seemingly incompatible technologies discharge physics and engineering with silicon planar processing technology to produce a new generation of on-chip devices and systems. The primary result of this research effort is the demonstration and development of small discharge devices integrated into silicon using techniques that are well know in the semiconductor industry. specifically, we have fabricated cylindrical discharges having diameters ranging from 20um to 400um on silicon and arrays of up to 5 elements on a single chip.