Micromirror Arrays for High Energy Applications

摘要

The ability to control the phase of a propagating optical wave front is a key enabling technology for a host of scientific, commercial, medical, and defense applications. The objectives of this project are to advance the state of the art of optical MEMS by addressing the following critical development issues: dynamic range, frequency response, aperture size, and optical power handling ability of micromirrors for thermal lensing compensation in lasing systems and optical beam steering. The research includes design, detailed modeling, simulation and experimental investigation of electro-mechanical behavior and optical power handling ability of micromirrors devices.