Atmospheric Pressure Plasma an Electron Cyclotron Resonance Plasma and Their Applications

摘要

The installation of an array of plasma torches is made easy by introducing a cylindrically shaped plasma torch module, which has been designed and constructed by remodeling components from two commercially available spark plugs and adding a tungsten wire as the central electrode. Use of modules as building blocks of a large volume plasma source also makes it easy to maintain the plasma source. This plasma torch module has been improved by adding a dc magnetic field between the electrodes, changing the geometry of the gas plenum chamber for allowing higher gas flow rate, and the shape and position of the central electrode.