Hot-Filament Assisted Deposition of Diamond in the Vapor of Methanol- Based Liquid Solutions

摘要

A method for depositing diamond crystals and diamond films in the vapor of methanol-based solutions is reported. The methanol-based solution contains a few percent by weight of one or more carbon containing compounds that have the ratio of carbon to oxygen being greater than one. A hot filament is applied to dissociate the vapor of the premixed solution and generate oxidizing and etching radicals such as OH, O, H as well as carbon depositing radicals such as CH3 Graphitic and amorphous carbon deposition is suppressed or preferentially etched resulting in the net deposition of good quality diamond crystals and diamond films.