Exploration of MEMS G-Switches at 100-10,000 G-Levels with Redundancy

摘要

The goal of this research program was to develop fundamental understanding necessary for producing novel MEMS/NEMS accelerometers that will characterize acceleration forces in the range of 100-10,000 g with high- precision, high-redundancy, high-frequency-response, high reliability, and high manufacturing repeatability. Such accelerometers consume a small fraction of power as compared to conventional accelerometers, which makes them ideal choices for applications where available power is limited.